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Semiconductor Lithography: Principles, Practices, and Materials - Microdevices Wayne M. Moreau Softcover reprint of the original 1st ed. 1988 edition
Semiconductor Lithography: Principles, Practices, and Materials - Microdevices
Wayne M. Moreau
In fabricating a semiconductor device such as a transistor, a series of hot processes consisting of vacuum film deposition, oxidations, and dopant implantation are all patterned into microscopic circuits by the wet processes of lithography.
952 pages, black & white illustrations
| Media | Boeken Paperback Book (Boek met zachte kaft en gelijmde rug) |
| Vrijgegeven | 22 februari 2012 |
| ISBN13 | 9781461282280 |
| Uitgevers | Springer-Verlag New York Inc. |
| Pagina's | 952 |
| Afmetingen | 170 × 244 × 48 mm · 1,48 kg |
| Taal en grammatica | Engels |