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Materials & Process Integration for MEMS - Microsystems Francis E H Tay Softcover reprint of hardcover 1st ed. 2002 edition
Materials & Process Integration for MEMS - Microsystems
Francis E H Tay
Although standard IC fabrication steps, particularly lithographic techniques, are leveraged heavily in the creation of MEMS devices, additional customized and novel micromachining techniques are needed to develop sophisticated MEMS structures.
328 pages, 176 black & white illustrations, biography
| Media | Boeken Paperback Book (Boek met zachte kaft en gelijmde rug) |
| Vrijgegeven | 3 december 2010 |
| ISBN13 | 9781441953032 |
| Uitgevers | Springer-Verlag New York Inc. |
| Pagina's | 299 |
| Afmetingen | 155 × 235 × 17 mm · 458 g |
| Taal en grammatica | Engels |
| Uitgever | Tay, Francis E. H. |