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Modelling of Microfabrication Systems - Microtechnology and MEMS Raja Nassar Softcover reprint of hardcover 1st ed. 2003 edition
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Modelling of Microfabrication Systems - Microtechnology and MEMS
Raja Nassar
This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
279 pages, 4 black & white illustrations, biography
| Media | Boeken Paperback Book (Boek met zachte kaft en gelijmde rug) |
| Vrijgegeven | 8 december 2010 |
| ISBN13 | 9783642055362 |
| Uitgevers | Springer-Verlag Berlin and Heidelberg Gm |
| Pagina's | 270 |
| Afmetingen | 155 × 235 × 14 mm · 394 g |
| Taal en grammatica | Duits |
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