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Handbook of Advanced Plasma Processing Techniques R J Shul
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Handbook of Advanced Plasma Processing Techniques
R J Shul
The ability to make small features in Si, metals, dielectrics and other materials has enabled rapid advances in computing and all other technologies that depend on microelectronics, miniature sensors and actuators and magnetic data storage. This work looks at plasma techniques, which enable the fine control and accurate pattern transfer.
655 pages, 141 black & white illustrations, 10 colour illustrations, biography
| Media | Boeken Hardcover Book (Boek met harde rug en kaft) |
| Vrijgegeven | 28 augustus 2000 |
| ISBN13 | 9783540667728 |
| Uitgevers | Springer-Verlag Berlin and Heidelberg Gm |
| Pagina's | 655 |
| Afmetingen | 166 × 244 × 49 mm · 1,05 kg |
| Taal en grammatica | Duits |
| Uitgever | Pearton, S. J. |
| Uitgever | Shul, R. J. |
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