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Dry Etching for VLSI - Updates in Applied Physics and Electrical Technology A.j. Van Roosmalen Softcover reprint of the original 1st ed. 1991 edition
Dry Etching for VLSI - Updates in Applied Physics and Electrical Technology
A.j. Van Roosmalen
This book has been written as part of a series of scientific books being published by Plenum Press. This book is unique in that it gives a compact, yet complete, in-depth overview of fundamentals, systems, processes, tools, and applications of etching with gas plasmas for VLSI.
256 pages, black & white illustrations
| Media | Boeken Paperback Book (Boek met zachte kaft en gelijmde rug) |
| Vrijgegeven | 29 mei 2013 |
| ISBN13 | 9781489925688 |
| Uitgevers | Springer-Verlag New York Inc. |
| Pagina's | 237 |
| Afmetingen | 178 × 254 × 13 mm · 449 g |
| Taal en grammatica | Engels |
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