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Microlithography: Science and Technology Bruce W. Smith 3e uitgave
Microlithography: Science and Technology
Bruce W. Smith
Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.
900 pages, 570 black & white illustrations, 40 black & white tables
| Media | Boeken Hardcover Book (Boek met harde rug en kaft) |
| Vrijgegeven | 20 mei 2020 |
| ISBN13 | 9781439876756 |
| Uitgevers | Taylor & Francis Inc |
| Pagina's | 838 |
| Afmetingen | 150 × 220 × 20 mm · 1,62 kg |
| Taal en grammatica | Engels |
| Uitgever | Smith, Bruce W. |
| Uitgever | Suzuki, Kazuaki |