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Fundamental Principles of Optical Lithography: The Science of Microfabrication
Mack, Chris (Lithoguru.com)
Fundamental Principles of Optical Lithography: The Science of Microfabrication
Mack, Chris (Lithoguru.com)
Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.
534 pages, Illustrations
Media | Boeken Paperback Book (Boek met zachte kaft en gelijmde rug) |
Vrijgegeven | 16 november 2007 |
ISBN13 | 9780470727300 |
Uitgevers | John Wiley & Sons Inc |
Pagina's | 544 |
Afmetingen | 247 × 174 × 29 mm · 916 g |
Taal en grammatica | Engels |
Bekijk alles van Mack, Chris (Lithoguru.com) ( bijv. Paperback Book en Hardcover Book )