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Cover for Jianfeng Luo · Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication: From Particle Scale to Feature, Die and Wafer Scales (Paperback Book) [Softcover reprint of hardcover 1st ed. 2004 edition] (2010)

Softcover reprint of hardcover 1st ed. 2004 edition

Integrated Modeling of Chemical ... (2010)

Cover for Jianfeng Luo · Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication: From Particle Scale to Feature, Die and Wafer Scales (Hardcover Book) [2004 edition] (2004)

Integrated Modeling of Chemical ... (2004)